IMS Nanofabrication AG (“IMS”) is an Austrian based high-tech company and was founded in Dec 2006 through the merger of the former IMS Nanofabrication GmbH and IMS – Ionen Mikrofabrikations Systeme GmbH. IMS acts as technology innovator and provider for the nanoworld and develops lithography tools for the semiconductor and nanotech industry, concentrating its main efforts presently on the development of an electron multi-beam Mask Exposure Tool (eMET) for the fabrication of leading-edge complex masks and templates.